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產品名稱：美國精量電子MEAS超聲波液位計SL-700
產品型號：SL-700
產品廠商：MEAS精量電子
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美國精量電子MEAS超聲波液位計SL-700,The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor

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DESCRIPTION

The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.

FEATURES APPLICATIONS

? 316 LSS machine body sensor	? Semiconductor industries
? Sensor material finish 10μin RA electropolished
? Miniature sensor size reduces liquid volume displacement ? Works with the following chemicals independent
of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA ? High pressure vessel application up to 250
PSIG (1724 Kpa) (consult factory for higher pressure applications)
? Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better ? Continuous transmitter output, 4-20 mA, 1-10 V,
RS-232, remote unit with digital display, two alarm

美國精量電子MEAS超聲波液位計SL-700

Parameter	Typical Value
Repeatability	±0.005 in (0.127 mm) typical
Input Power	VDC, 115 VAC/230VAC, 50/60 Hz (optional)
Output	Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm
Housing	NEMA 1; NEMA-4X (stainless steel) optional
Range	to 10 in (25.4 to 254 mm) (consult factory for longer range

Parameter	Typical Value
Mounting	?’ M VCR, ?” F VCR
Sensor Material	LSS (standard)
Operating Pressure	Up to 250 PSIG (1724 Kpa)
Temperature	Sensor: -20 to 200 °F (-29 to 93 °C) Electronics: -20 to 170 °F (-29 to 77 °C)

MECHANICAL DIMENSIONS

in inches [mm]

PERFORMANCE SPECIFICATIONS

美國精量電子MEAS超聲波液位計SL-700

Figure 1: SL-700 series elements electronic module

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產品名稱：美國精量電子MEAS超聲波液位計SL-700

FEATURES APPLICATIONS

MECHANICAL DIMENSIONS in inches [mm] PERFORMANCE SPECIFICATIONS

MECHANICAL DIMENSIONS

in inches [mm]

PERFORMANCE SPECIFICATIONS